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 One of the major driving forces for the continuing rapid
development in the information and communication fields is
in electronic devices: The foundation of this dynamic
progress and development is the alacritous miniaturisation
of semiconductor integrated circuits. It has been forecast
that by the year 2018, interconnect widths will be reduced
to 10 nm – requiring a processing accuracy of 1 nm and hence
a measuring accuracy of 0.1 nm, therefore this rapid
miniaturisation, if it is to continue unabated, will require
a similarly rapid improvement in the spatial resolution of
measurement and characterisation. Presently, Scanning Probe Microscopy (SPM)
is the only tool which enables true atomic scale resolution
and hence its role is becoming progressively important in
the face of continued diminution
For more information on scanning probe microscopy
activity at IMRE, please contact:
spm@imre.a-star.edu.sg
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