This page is updated and maintained by TANG Xiaosong, Eric.
Dr. TANG Xiaosong, Eric
Dr. TANG Xiaosong, Eric
Senior Specialist II
Capability Group / Department:
SERC nano Fabrication Processing and Characterisation (SnFPC)
3 Research Link Singapore 117602
Nano-fabrication and technology
Design, fabrication and characterization of MEMS/NEMS devices
Dry etching of semiconductor materials
Dry etching of silicon materials
MEMS/NEMS based device design, fabrication and characterization
Dynamic MEMS characterization using laser vibrometer
Friction and tribology issue related to microstructures
Superlubricity related AFM technology
2001 - Present
Senior Research Officer, IMRE
2005 - present
PhD candidates, Mechanical Engineering, NUS
1998 - 1999
Visiting Scientist, Cornell University
1994 - 1997
Engineer, Charterred Semiconductor and Manufacturing
BSc., Xian Jiaotong University 1994
Meng(Electricall Engineering), Cornell University, USA
Ph.D. candidates (Mechanical Engineering), National University of Singapore, Singapore,
Honours and Awards
1998/1999 Visiting Scientist, Cornell University
Other Professional Appointments / Membership
X.S. Tang, Y.C. Loke, P. Lu, S.K. Sinha, and S.J. O’Shea “Friction measurement on free standing plates using atomic force microscopy", Review of Scientific Instruments ,84(1), 2012
P. Lu, Y.C. Loke, X.S. Tang, S. S. Kushvaha and S.J. O‘Shea, “A note on the two-spring Tomlinson model", Tribology Letters, 43(1), (2011), 73-76.
X.S. Tang, S.J. O’Shea and Ivan U. Vakarelski “Photoresist Templates for Wafer-Scale Defect-Free Evaporative Lithography” Advanced Materials, 22, (2010) 5150–5153
Yee Loke Chong, Wulf Hofbauer, Pin Lu, Kambiz Ansari, Xiaosong Tang, and S. O'Shea “Electroplated CoPt magnets for actuation of stiff cantilevers” Review of Scientific Instruments (accepted)
I.U. Vakarelski, R. Manica, X.S. Tang, S.J. O‘Shea, G.W. Stevens, F. Grieser, R.R. Dagastine and D.Y.C. Chan “Dynamic interactions between microbubbles in water” PNAS 107 (25) (2010), 11177–11182.
IU Vakarelski, JW Kwek, X Tang, SJ O'Shea,“Particulate Templates and Ordered Liquid Bridge Networks in Evaporative Lithography”, Langmuir, 2009 25 (23), 13311-13314. This paper has been selected for highlighting by A*STAR Research.
O. Manor, I.U. Vakarelski, X.S. Tang, S.J. O’Shea, G.W. Stevens, F. Grieser, R.R. Dagastine and D.Y.C. Chan, “Hydrodynamic boundary conditions and dynamic forces between bubbles and surfaces”, Phys. Rev. Lett. 101 (2008), 024501.
Microfabricated devices for friction measurements, Tang Xiaosong, Sujeet K. Sinha and S.J. O‘Shea, ICMAT 2009, International Conference on Materials for Advanced Technologies, June 28 – July 3 2009, Singapore.
Fabrication of mass loaded MRFM cantilever with integrated tip and ultra-low spring constant, Tang Xiaosong, Simon Rast, Ernst Meyer, Sujeet K. Sinha and S.J. O‘Shea, ICMAT 2009, International Conference on Materials for Advanced Technologies, June 28 – July 3 2009, Singapore.
A Tomlinson based model for two-tip sled in atomic-scale friction‖, Pin Lu, Loke Yee Chong, Xiaosong Tang, Sunil S. Kushvaha, Sean J. O'Shea, Workshop Nano-Tribology and related Materials Issues in MEMS, 13-14 May 2010, Singapore.
Biao Li, Xiaosong Tang, "Focused Ion Beam (FIB) Nano-Machining and FIB Moiré Technique for Strain Analysis in MEMS/NEMS Structures and Devices", accepted, MEMS2003.
B. Li, Xiaosong. Tang "Strain Analysis in MEMS/NEMS Structures and Devices by Focused Ion Beam System", Accepted, NanoTech2003. Santiranjan Shannigrahi, Francis Eng Hock Tay, Tang Xiaosong, Cheryl Liew Kuan Pong, Yao Kui "In-Situ Stress Analysis Of Sol-Gel Deposited Pzt Thin Film On Pt/Ti/Sio2/Si Substrate" Accepted, MRS2003.
Franck Chollet, Tang Xiaosong, "Displacement/Acceleration Optical Sensing With Surface Micromachined Shutter and Low -voltage Electronics" Transducers 99 2D 1.4.
US 6183189. EZ Liu, XS Tang, Charles Lin and YS Lien, "Self-aligning wafer chuck design for wafer process tools".