This page is updated and maintained by TANG Xiaosong, Eric.
Dr. TANG Xiaosong, Eric
Name: Dr. TANG Xiaosong, Eric
Designation: Senior Specialist II
Capability Group / Department: SERC nano Fabrication Processing and Characterisation (SnFPC)
Address: 3 Research Link
Singapore 117602
Tel: (65) 6874 8077
Research Interests/Areas
  • Nano-fabrication and technology
  • Design, fabrication and characterization of MEMS/NEMS devices
  • Dry etching of semiconductor materials
Specialised Expertise Dry etching of silicon materials
MEMS/NEMS based device design, fabrication and characterization
Dynamic MEMS characterization using laser vibrometer
Friction and tribology issue related to microstructures
Superlubricity related AFM technology

Superlubricity machines

Working Experience
2001 - Present Senior Research Officer, IMRE
2005 - present PhD candidates, Mechanical Engineering, NUS
1998 - 1999 Visiting Scientist, Cornell University
1994 - 1997 Engineer, Charterred Semiconductor and Manufacturing
Academic Qualifications
  • BSc., Xian Jiaotong University 1994
  • Meng(Electricall Engineering), Cornell University, USA
  • Ph.D. candidates (Mechanical Engineering), National University of Singapore, Singapore,
Honours and Awards 1998/1999 Visiting Scientist, Cornell University
Other Professional Appointments / Membership
Selected Publications Journal paper:
X.S. Tang, Y.C. Loke, P. Lu, S.K. Sinha, and S.J. O’Shea “Friction measurement on free standing plates using atomic force microscopy", Review of Scientific Instruments ,84(1),

P. Lu, Y.C. Loke, X.S. Tang, S. S. Kushvaha and S.J. O‘Shea, “A note on the two-spring Tomlinson model", Tribology Letters, 43(1), (2011), 73-76.

X.S. Tang, S.J. O’Shea and Ivan U. Vakarelski “Photoresist Templates for Wafer-Scale Defect-Free Evaporative Lithography” Advanced Materials, 22, (2010) 5150–5153

Yee Loke Chong, Wulf Hofbauer, Pin Lu, Kambiz Ansari, Xiaosong Tang, and S. O'Shea
“Electroplated CoPt magnets for actuation of stiff cantilevers” Review of Scientific Instruments (accepted)

I.U. Vakarelski, R. Manica, X.S. Tang, S.J. O‘Shea, G.W. Stevens, F. Grieser, R.R. Dagastine and D.Y.C. Chan “Dynamic interactions between microbubbles in water” PNAS 107 (25) (2010), 11177–11182.

IU Vakarelski, JW Kwek, X Tang, SJ O'Shea,“Particulate Templates and Ordered Liquid Bridge Networks in Evaporative Lithography”, Langmuir, 2009 25 (23), 13311-13314. This paper has been selected for highlighting by A*STAR Research.
O. Manor, I.U. Vakarelski, X.S. Tang, S.J. O’Shea, G.W. Stevens, F. Grieser, R.R. Dagastine and D.Y.C. Chan, “Hydrodynamic boundary conditions and dynamic forces between bubbles and surfaces”, Phys. Rev. Lett. 101 (2008), 024501.
Conference paper:
Microfabricated devices for friction measurements, Tang Xiaosong, Sujeet K. Sinha and S.J. O‘Shea, ICMAT 2009, International Conference on Materials for Advanced Technologies, June 28 – July 3 2009, Singapore.
Fabrication of mass loaded MRFM cantilever with integrated tip and ultra-low spring constant, Tang Xiaosong, Simon Rast, Ernst Meyer, Sujeet K. Sinha and S.J. O‘Shea, ICMAT 2009, International Conference on Materials for Advanced Technologies, June 28 – July 3 2009, Singapore.
A Tomlinson based model for two-tip sled in atomic-scale friction‖, Pin Lu, Loke Yee Chong, Xiaosong Tang, Sunil S. Kushvaha, Sean J. O'Shea, Workshop Nano-Tribology and related Materials Issues in MEMS, 13-14 May 2010, Singapore.

Other Paper

Biao Li, Xiaosong Tang, "Focused Ion Beam (FIB) Nano-Machining and FIB Moiré Technique for Strain Analysis in MEMS/NEMS Structures and Devices", accepted, MEMS2003.

B. Li, Xiaosong. Tang "Strain Analysis in MEMS/NEMS Structures and Devices by Focused Ion Beam System", Accepted, NanoTech2003.

Santiranjan Shannigrahi, Francis Eng Hock Tay, Tang Xiaosong, Cheryl Liew Kuan Pong, Yao Kui "In-Situ Stress Analysis Of Sol-Gel Deposited Pzt Thin Film On Pt/Ti/Sio2/Si Substrate" Accepted, MRS2003.

Franck Chollet, Tang Xiaosong, "Displacement/Acceleration Optical Sensing With Surface Micromachined Shutter and Low -voltage Electronics" Transducers 99 2D 1.4.
Patents Filed
  • US 6183189. EZ Liu, XS Tang, Charles Lin and YS Lien, "Self-aligning wafer chuck design for wafer process tools".
External URL Description

Last updated on 20 Sep 2013 10:15 AM